Controlling film thickness to precise specifications is essential for ensuring high yield in high-performance devices.

Thin films can be made from a variety of materials, including metals (e.g., gold, silver), oxides (e.g., silicon dioxide, titanium dioxide), and semiconductors (e.g ...

Typically less than one micron thick, thin films can be conductive or dielectric (non-conductive) and are used in myriad applications. For example, the top metallic layer on a chip and the coating ...

From cell phones to solar panels to quantum computers, thin films are essential to current and emerging technologies. But making functional thin films requires control. During hours-long processes, ...

We have investigated the UV and VUV optical properties of various metal, oxide, nitride, silicide, and intermetallic thin films and multilayer film stacks for optical and barrier layer applications.